7/16/2010	9:10:15 AM	Recipe started at 9:10 AM
7/16/2010	9:10:15 AM	Helium valve closed
7/16/2010	9:10:15 AM	BCl3 valve closed
7/16/2010	9:10:15 AM	PH3 valve closed
7/16/2010	9:10:15 AM	SiCl4 pre valve closed
7/16/2010	9:10:15 AM	SiCl4 post valve closed
7/16/2010	9:10:15 AM	Main Vac valve closed
7/16/2010	9:10:15 AM	Bypass valve closed
7/16/2010	9:10:15 AM	Bubbler valve closed
7/16/2010	9:10:15 AM	H2 valve opened
7/16/2010	9:10:15 AM	Helium MFC set to  0.000000
7/16/2010	9:10:15 AM	H2 MFC set to  500.000000
7/16/2010	9:10:15 AM	BCl3 MFC set to  0.000000
7/16/2010	9:10:15 AM	PHl3 MFC set to  0.000000
7/16/2010	9:10:15 AM	SiCl4 MFC set to  0.000000
7/16/2010	9:10:15 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	9:10:15 AM	Tube furnace set to 0
7/16/2010	9:11:38 AM	Helium valve closed
7/16/2010	9:11:38 AM	BCl3 valve closed
7/16/2010	9:11:38 AM	PH3 valve closed
7/16/2010	9:11:38 AM	SiCl4 pre valve closed
7/16/2010	9:11:38 AM	SiCl4 post valve closed
7/16/2010	9:11:38 AM	Main Vac valve closed
7/16/2010	9:11:38 AM	Bypass valve closed
7/16/2010	9:11:38 AM	H2 valve opened
7/16/2010	9:11:38 AM	Bubbler valve opened
7/16/2010	9:11:38 AM	Helium MFC set to  0.000000
7/16/2010	9:11:38 AM	H2 MFC set to  500.000000
7/16/2010	9:11:38 AM	BCl3 MFC set to  0.000000
7/16/2010	9:11:38 AM	PHl3 MFC set to  0.000000
7/16/2010	9:11:38 AM	SiCl4 MFC set to  0.000000
7/16/2010	9:11:38 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	9:11:38 AM	Tube furnace set to 1000
7/16/2010	9:31:38 AM	Helium valve closed
7/16/2010	9:31:38 AM	PH3 valve closed
7/16/2010	9:31:38 AM	Main Vac valve closed
7/16/2010	9:31:38 AM	Bypass valve closed
7/16/2010	9:31:38 AM	H2 valve opened
7/16/2010	9:31:38 AM	BCl3 valve opened
7/16/2010	9:31:38 AM	SiCl4 pre valve opened
7/16/2010	9:31:38 AM	SiCl4 post valve opened
7/16/2010	9:31:38 AM	Bubbler valve opened
7/16/2010	9:31:38 AM	Helium MFC set to  0.000000
7/16/2010	9:31:38 AM	H2 MFC set to  500.000000
7/16/2010	9:31:38 AM	BCl3 MFC set to  12.000000
7/16/2010	9:31:38 AM	PHl3 MFC set to  0.000000
7/16/2010	9:31:38 AM	SiCl4 MFC set to  50.000000
7/16/2010	9:31:38 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	9:31:38 AM	Tube furnace set to 1000
7/16/2010	9:51:38 AM	H2 valve closed
7/16/2010	9:51:38 AM	BCl3 valve closed
7/16/2010	9:51:38 AM	PH3 valve closed
7/16/2010	9:51:38 AM	SiCl4 pre valve closed
7/16/2010	9:51:38 AM	SiCl4 post valve closed
7/16/2010	9:51:38 AM	Main Vac valve closed
7/16/2010	9:51:38 AM	Bypass valve closed
7/16/2010	9:51:38 AM	Helium valve opened
7/16/2010	9:51:38 AM	Bubbler valve opened
7/16/2010	9:51:38 AM	Helium MFC set to  500.000000
7/16/2010	9:51:38 AM	H2 MFC set to  0.000000
7/16/2010	9:51:38 AM	BCl3 MFC set to  0.000000
7/16/2010	9:51:38 AM	PHl3 MFC set to  0.000000
7/16/2010	9:51:38 AM	SiCl4 MFC set to  0.000000
7/16/2010	9:51:38 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	9:51:38 AM	Tube furnace set to 0
7/16/2010	10:11:38 AM	Helium valve closed
7/16/2010	10:11:38 AM	H2 valve closed
7/16/2010	10:11:38 AM	BCl3 valve closed
7/16/2010	10:11:38 AM	PH3 valve closed
7/16/2010	10:11:38 AM	SiCl4 pre valve closed
7/16/2010	10:11:38 AM	SiCl4 post valve closed
7/16/2010	10:11:38 AM	Main Vac valve closed
7/16/2010	10:11:38 AM	Bypass valve closed
7/16/2010	10:11:38 AM	Bubbler valve closed
7/16/2010	10:11:38 AM	Helium MFC set to  0.000000
7/16/2010	10:11:38 AM	H2 MFC set to  0.000000
7/16/2010	10:11:38 AM	BCl3 MFC set to  0.000000
7/16/2010	10:11:38 AM	PHl3 MFC set to  0.000000
7/16/2010	10:11:38 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:11:38 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:11:39 AM	Tube furnace set to 0
7/16/2010	10:11:39 AM	Run finished at 10:11 AM
7/16/2010	10:16:04 AM	Helium MFC set to  100.000000
7/16/2010	10:16:05 AM	Helium valve opened
7/16/2010	10:16:16 AM	Helium MFC set to  100.000000
7/16/2010	10:16:30 AM	Bubbler valve opened
7/16/2010	10:16:38 AM	Helium MFC set to  300.000000
7/16/2010	10:21:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/16/2010	10:21:25 AM	Recipe started at 10:21 AM
7/16/2010	10:21:25 AM	Helium valve closed
7/16/2010	10:21:25 AM	H2 valve closed
7/16/2010	10:21:25 AM	BCl3 valve closed
7/16/2010	10:21:25 AM	PH3 valve closed
7/16/2010	10:21:25 AM	SiCl4 pre valve closed
7/16/2010	10:21:25 AM	SiCl4 post valve closed
7/16/2010	10:21:25 AM	Main Vac valve closed
7/16/2010	10:21:25 AM	Bypass valve closed
7/16/2010	10:21:25 AM	Bubbler valve closed
7/16/2010	10:21:25 AM	Helium MFC set to  0.000000
7/16/2010	10:21:25 AM	H2 MFC set to  0.000000
7/16/2010	10:21:25 AM	BCl3 MFC set to  0.000000
7/16/2010	10:21:25 AM	PHl3 MFC set to  0.000000
7/16/2010	10:21:25 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:21:25 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:21:26 AM	Tube furnace set to 0
7/16/2010	10:21:26 AM	Run finished at 10:21 AM
7/16/2010	10:21:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/16/2010	10:23:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	10:23:57 AM	Recipe started at 10:23 AM
7/16/2010	10:23:57 AM	Helium valve closed
7/16/2010	10:23:57 AM	H2 valve closed
7/16/2010	10:23:57 AM	BCl3 valve closed
7/16/2010	10:23:57 AM	PH3 valve closed
7/16/2010	10:23:57 AM	SiCl4 pre valve closed
7/16/2010	10:23:57 AM	SiCl4 post valve closed
7/16/2010	10:23:57 AM	Main Vac valve closed
7/16/2010	10:23:57 AM	Bubbler valve closed
7/16/2010	10:23:57 AM	Bypass valve opened
7/16/2010	10:23:57 AM	Helium MFC set to  0.000000
7/16/2010	10:23:57 AM	H2 MFC set to  0.000000
7/16/2010	10:23:57 AM	BCl3 MFC set to  0.000000
7/16/2010	10:23:57 AM	PHl3 MFC set to  0.000000
7/16/2010	10:23:57 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:23:57 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:23:58 AM	Tube furnace set to 0
7/16/2010	10:24:31 AM	Helium valve closed
7/16/2010	10:24:31 AM	H2 valve closed
7/16/2010	10:24:31 AM	BCl3 valve closed
7/16/2010	10:24:31 AM	PH3 valve closed
7/16/2010	10:24:31 AM	SiCl4 pre valve closed
7/16/2010	10:24:31 AM	SiCl4 post valve closed
7/16/2010	10:24:31 AM	Bubbler valve closed
7/16/2010	10:24:31 AM	Main Vac valve opened
7/16/2010	10:24:31 AM	Bypass valve opened
7/16/2010	10:24:31 AM	Helium MFC set to  0.000000
7/16/2010	10:24:31 AM	H2 MFC set to  0.000000
7/16/2010	10:24:31 AM	BCl3 MFC set to  0.000000
7/16/2010	10:24:31 AM	PHl3 MFC set to  0.000000
7/16/2010	10:24:31 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:24:31 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:24:31 AM	Tube furnace set to 0
7/16/2010	10:24:32 AM	Run finished at 10:24 AM
7/16/2010	10:24:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	10:34:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/16/2010	10:34:07 AM	Recipe started at 10:34 AM
7/16/2010	10:34:07 AM	Helium valve closed
7/16/2010	10:34:07 AM	H2 valve closed
7/16/2010	10:34:07 AM	BCl3 valve closed
7/16/2010	10:34:07 AM	PH3 valve closed
7/16/2010	10:34:07 AM	SiCl4 pre valve closed
7/16/2010	10:34:07 AM	SiCl4 post valve closed
7/16/2010	10:34:07 AM	Main Vac valve closed
7/16/2010	10:34:07 AM	Bubbler valve closed
7/16/2010	10:34:07 AM	Bypass valve opened
7/16/2010	10:34:07 AM	Helium MFC set to  0.000000
7/16/2010	10:34:07 AM	H2 MFC set to  0.000000
7/16/2010	10:34:07 AM	BCl3 MFC set to  0.000000
7/16/2010	10:34:07 AM	PHl3 MFC set to  0.000000
7/16/2010	10:34:07 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:34:07 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:34:07 AM	Tube furnace set to 0
7/16/2010	10:34:08 AM	Helium valve closed
7/16/2010	10:34:08 AM	H2 valve closed
7/16/2010	10:34:08 AM	BCl3 valve closed
7/16/2010	10:34:08 AM	PH3 valve closed
7/16/2010	10:34:08 AM	SiCl4 pre valve closed
7/16/2010	10:34:08 AM	SiCl4 post valve closed
7/16/2010	10:34:08 AM	Bubbler valve closed
7/16/2010	10:34:08 AM	Main Vac valve opened
7/16/2010	10:34:08 AM	Bypass valve opened
7/16/2010	10:34:08 AM	Helium MFC set to  0.000000
7/16/2010	10:34:08 AM	H2 MFC set to  0.000000
7/16/2010	10:34:08 AM	BCl3 MFC set to  0.000000
7/16/2010	10:34:08 AM	PHl3 MFC set to  0.000000
7/16/2010	10:34:08 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:34:08 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:34:08 AM	Tube furnace set to 0
7/16/2010	10:34:17 AM	H2 valve closed
7/16/2010	10:34:17 AM	BCl3 valve closed
7/16/2010	10:34:17 AM	PH3 valve closed
7/16/2010	10:34:17 AM	SiCl4 pre valve closed
7/16/2010	10:34:17 AM	SiCl4 post valve closed
7/16/2010	10:34:17 AM	Bubbler valve closed
7/16/2010	10:34:17 AM	Helium valve opened
7/16/2010	10:34:17 AM	Main Vac valve opened
7/16/2010	10:34:18 AM	Bypass valve opened
7/16/2010	10:34:18 AM	Helium MFC set to  100.000000
7/16/2010	10:34:18 AM	H2 MFC set to  0.000000
7/16/2010	10:34:18 AM	BCl3 MFC set to  0.000000
7/16/2010	10:34:18 AM	PHl3 MFC set to  0.000000
7/16/2010	10:34:18 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:34:18 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:34:18 AM	Tube furnace set to 0
7/16/2010	10:37:22 AM	Helium valve closed
7/16/2010	10:37:22 AM	H2 valve closed
7/16/2010	10:37:22 AM	BCl3 valve closed
7/16/2010	10:37:22 AM	PH3 valve closed
7/16/2010	10:37:22 AM	SiCl4 pre valve closed
7/16/2010	10:37:22 AM	SiCl4 post valve closed
7/16/2010	10:37:22 AM	Bubbler valve closed
7/16/2010	10:37:22 AM	Main Vac valve opened
7/16/2010	10:37:22 AM	Bypass valve opened
7/16/2010	10:37:22 AM	Helium MFC set to  0.000000
7/16/2010	10:37:22 AM	H2 MFC set to  0.000000
7/16/2010	10:37:22 AM	BCl3 MFC set to  0.000000
7/16/2010	10:37:22 AM	PHl3 MFC set to  0.000000
7/16/2010	10:37:22 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:37:22 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:37:22 AM	Tube furnace set to 0
7/16/2010	10:38:22 AM	H2 valve closed
7/16/2010	10:38:22 AM	BCl3 valve closed
7/16/2010	10:38:22 AM	PH3 valve closed
7/16/2010	10:38:22 AM	SiCl4 pre valve closed
7/16/2010	10:38:22 AM	SiCl4 post valve closed
7/16/2010	10:38:22 AM	Bubbler valve closed
7/16/2010	10:38:22 AM	Helium valve opened
7/16/2010	10:38:22 AM	Main Vac valve opened
7/16/2010	10:38:22 AM	Bypass valve opened
7/16/2010	10:38:22 AM	Helium MFC set to  100.000000
7/16/2010	10:38:22 AM	H2 MFC set to  0.000000
7/16/2010	10:38:22 AM	BCl3 MFC set to  0.000000
7/16/2010	10:38:22 AM	PHl3 MFC set to  0.000000
7/16/2010	10:38:22 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:38:22 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:38:22 AM	Tube furnace set to 0
7/16/2010	10:38:44 AM	Helium valve closed
7/16/2010	10:38:44 AM	H2 valve closed
7/16/2010	10:38:44 AM	BCl3 valve closed
7/16/2010	10:38:44 AM	PH3 valve closed
7/16/2010	10:38:44 AM	SiCl4 pre valve closed
7/16/2010	10:38:44 AM	SiCl4 post valve closed
7/16/2010	10:38:44 AM	Bubbler valve closed
7/16/2010	10:38:44 AM	Main Vac valve opened
7/16/2010	10:38:44 AM	Bypass valve opened
7/16/2010	10:38:44 AM	Helium MFC set to  0.000000
7/16/2010	10:38:44 AM	H2 MFC set to  0.000000
7/16/2010	10:38:44 AM	BCl3 MFC set to  0.000000
7/16/2010	10:38:44 AM	PHl3 MFC set to  0.000000
7/16/2010	10:38:44 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:38:44 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:38:44 AM	Tube furnace set to 0
7/16/2010	10:39:44 AM	H2 valve closed
7/16/2010	10:39:44 AM	BCl3 valve closed
7/16/2010	10:39:44 AM	PH3 valve closed
7/16/2010	10:39:44 AM	SiCl4 pre valve closed
7/16/2010	10:39:44 AM	SiCl4 post valve closed
7/16/2010	10:39:44 AM	Bubbler valve closed
7/16/2010	10:39:44 AM	Helium valve opened
7/16/2010	10:39:44 AM	Main Vac valve opened
7/16/2010	10:39:44 AM	Bypass valve opened
7/16/2010	10:39:44 AM	Helium MFC set to  100.000000
7/16/2010	10:39:44 AM	H2 MFC set to  0.000000
7/16/2010	10:39:44 AM	BCl3 MFC set to  0.000000
7/16/2010	10:39:44 AM	PHl3 MFC set to  0.000000
7/16/2010	10:39:44 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:39:44 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:39:44 AM	Tube furnace set to 0
7/16/2010	10:48:44 AM	Helium valve closed
7/16/2010	10:48:44 AM	H2 valve closed
7/16/2010	10:48:44 AM	BCl3 valve closed
7/16/2010	10:48:44 AM	PH3 valve closed
7/16/2010	10:48:44 AM	SiCl4 pre valve closed
7/16/2010	10:48:44 AM	SiCl4 post valve closed
7/16/2010	10:48:44 AM	Bubbler valve closed
7/16/2010	10:48:44 AM	Main Vac valve opened
7/16/2010	10:48:44 AM	Bypass valve opened
7/16/2010	10:48:44 AM	Helium MFC set to  0.000000
7/16/2010	10:48:44 AM	H2 MFC set to  0.000000
7/16/2010	10:48:44 AM	BCl3 MFC set to  0.000000
7/16/2010	10:48:44 AM	PHl3 MFC set to  0.000000
7/16/2010	10:48:44 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:48:44 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:48:44 AM	Tube furnace set to 0
7/16/2010	10:48:45 AM	Run finished at 10:48 AM
7/16/2010	10:48:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/16/2010	10:51:33 AM	Main Vac valve closed
7/16/2010	10:51:35 AM	Bypass valve closed
7/16/2010	10:51:44 AM	Bypass valve opened
7/16/2010	10:51:46 AM	Main Vac valve opened
7/16/2010	10:53:00 AM	Recipe started at 10:52 AM
7/16/2010	10:53:00 AM	Helium valve closed
7/16/2010	10:53:00 AM	BCl3 valve closed
7/16/2010	10:53:00 AM	PH3 valve closed
7/16/2010	10:53:00 AM	SiCl4 pre valve closed
7/16/2010	10:53:00 AM	SiCl4 post valve closed
7/16/2010	10:53:00 AM	Main Vac valve closed
7/16/2010	10:53:00 AM	Bypass valve closed
7/16/2010	10:53:00 AM	Bubbler valve closed
7/16/2010	10:53:00 AM	H2 valve opened
7/16/2010	10:53:00 AM	Helium MFC set to  0.000000
7/16/2010	10:53:00 AM	H2 MFC set to  500.000000
7/16/2010	10:53:00 AM	BCl3 MFC set to  0.000000
7/16/2010	10:53:00 AM	PHl3 MFC set to  0.000000
7/16/2010	10:53:00 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:53:00 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:53:00 AM	Tube furnace set to 0
7/16/2010	10:54:21 AM	Helium valve closed
7/16/2010	10:54:21 AM	BCl3 valve closed
7/16/2010	10:54:21 AM	PH3 valve closed
7/16/2010	10:54:21 AM	SiCl4 pre valve closed
7/16/2010	10:54:21 AM	SiCl4 post valve closed
7/16/2010	10:54:21 AM	Main Vac valve closed
7/16/2010	10:54:21 AM	Bypass valve closed
7/16/2010	10:54:21 AM	H2 valve opened
7/16/2010	10:54:21 AM	Bubbler valve opened
7/16/2010	10:54:21 AM	Helium MFC set to  0.000000
7/16/2010	10:54:21 AM	H2 MFC set to  500.000000
7/16/2010	10:54:21 AM	BCl3 MFC set to  0.000000
7/16/2010	10:54:21 AM	PHl3 MFC set to  0.000000
7/16/2010	10:54:21 AM	SiCl4 MFC set to  0.000000
7/16/2010	10:54:21 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	10:54:21 AM	Tube furnace set to 1000
7/16/2010	11:14:21 AM	Helium valve closed
7/16/2010	11:14:21 AM	PH3 valve closed
7/16/2010	11:14:21 AM	Main Vac valve closed
7/16/2010	11:14:21 AM	Bypass valve closed
7/16/2010	11:14:21 AM	H2 valve opened
7/16/2010	11:14:21 AM	BCl3 valve opened
7/16/2010	11:14:21 AM	SiCl4 pre valve opened
7/16/2010	11:14:21 AM	SiCl4 post valve opened
7/16/2010	11:14:21 AM	Bubbler valve opened
7/16/2010	11:14:21 AM	Helium MFC set to  0.000000
7/16/2010	11:14:21 AM	H2 MFC set to  500.000000
7/16/2010	11:14:21 AM	BCl3 MFC set to  12.000000
7/16/2010	11:14:21 AM	PHl3 MFC set to  0.000000
7/16/2010	11:14:21 AM	SiCl4 MFC set to  50.000000
7/16/2010	11:14:21 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	11:14:22 AM	Tube furnace set to 1000
7/16/2010	11:29:22 AM	H2 valve closed
7/16/2010	11:29:22 AM	BCl3 valve closed
7/16/2010	11:29:22 AM	PH3 valve closed
7/16/2010	11:29:22 AM	SiCl4 pre valve closed
7/16/2010	11:29:22 AM	SiCl4 post valve closed
7/16/2010	11:29:22 AM	Main Vac valve closed
7/16/2010	11:29:22 AM	Bypass valve closed
7/16/2010	11:29:22 AM	Helium valve opened
7/16/2010	11:29:22 AM	Bubbler valve opened
7/16/2010	11:29:22 AM	Helium MFC set to  500.000000
7/16/2010	11:29:22 AM	H2 MFC set to  0.000000
7/16/2010	11:29:22 AM	BCl3 MFC set to  0.000000
7/16/2010	11:29:22 AM	PHl3 MFC set to  0.000000
7/16/2010	11:29:22 AM	SiCl4 MFC set to  0.000000
7/16/2010	11:29:22 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	11:29:22 AM	Tube furnace set to 0
7/16/2010	11:54:22 AM	Helium valve closed
7/16/2010	11:54:22 AM	H2 valve closed
7/16/2010	11:54:22 AM	BCl3 valve closed
7/16/2010	11:54:22 AM	PH3 valve closed
7/16/2010	11:54:22 AM	SiCl4 pre valve closed
7/16/2010	11:54:22 AM	SiCl4 post valve closed
7/16/2010	11:54:22 AM	Main Vac valve closed
7/16/2010	11:54:22 AM	Bypass valve closed
7/16/2010	11:54:22 AM	Bubbler valve closed
7/16/2010	11:54:22 AM	Helium MFC set to  0.000000
7/16/2010	11:54:22 AM	H2 MFC set to  0.000000
7/16/2010	11:54:22 AM	BCl3 MFC set to  0.000000
7/16/2010	11:54:22 AM	PHl3 MFC set to  0.000000
7/16/2010	11:54:22 AM	SiCl4 MFC set to  0.000000
7/16/2010	11:54:22 AM	Bypass solenoid MFC set to  0.000000
7/16/2010	11:54:22 AM	Tube furnace set to 0
7/16/2010	11:54:22 AM	Run finished at 11:54 AM
7/16/2010	12:01:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	12:01:01 PM	Recipe started at 12:01 PM
7/16/2010	12:01:01 PM	Helium valve closed
7/16/2010	12:01:01 PM	H2 valve closed
7/16/2010	12:01:01 PM	BCl3 valve closed
7/16/2010	12:01:01 PM	PH3 valve closed
7/16/2010	12:01:01 PM	SiCl4 pre valve closed
7/16/2010	12:01:01 PM	SiCl4 post valve closed
7/16/2010	12:01:01 PM	Main Vac valve closed
7/16/2010	12:01:01 PM	Bubbler valve closed
7/16/2010	12:01:01 PM	Bypass valve opened
7/16/2010	12:01:01 PM	Helium MFC set to  0.000000
7/16/2010	12:01:01 PM	H2 MFC set to  0.000000
7/16/2010	12:01:01 PM	BCl3 MFC set to  0.000000
7/16/2010	12:01:01 PM	PHl3 MFC set to  0.000000
7/16/2010	12:01:01 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:01:01 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:01:01 PM	Tube furnace set to 0
7/16/2010	12:01:35 PM	Helium valve closed
7/16/2010	12:01:35 PM	H2 valve closed
7/16/2010	12:01:35 PM	BCl3 valve closed
7/16/2010	12:01:35 PM	PH3 valve closed
7/16/2010	12:01:35 PM	SiCl4 pre valve closed
7/16/2010	12:01:35 PM	SiCl4 post valve closed
7/16/2010	12:01:35 PM	Bubbler valve closed
7/16/2010	12:01:35 PM	Main Vac valve opened
7/16/2010	12:01:35 PM	Bypass valve opened
7/16/2010	12:01:35 PM	Helium MFC set to  0.000000
7/16/2010	12:01:35 PM	H2 MFC set to  0.000000
7/16/2010	12:01:35 PM	BCl3 MFC set to  0.000000
7/16/2010	12:01:35 PM	PHl3 MFC set to  0.000000
7/16/2010	12:01:35 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:01:35 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:01:35 PM	Tube furnace set to 0
7/16/2010	12:01:35 PM	Run finished at 12:01 PM
7/16/2010	12:01:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	12:02:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/16/2010	12:02:31 PM	Recipe started at 12:02 PM
7/16/2010	12:02:31 PM	H2 valve closed
7/16/2010	12:02:31 PM	BCl3 valve closed
7/16/2010	12:02:31 PM	PH3 valve closed
7/16/2010	12:02:31 PM	SiCl4 pre valve closed
7/16/2010	12:02:31 PM	SiCl4 post valve closed
7/16/2010	12:02:31 PM	Main Vac valve closed
7/16/2010	12:02:31 PM	Bypass valve closed
7/16/2010	12:02:31 PM	Bubbler valve closed
7/16/2010	12:02:31 PM	Helium valve opened
7/16/2010	12:02:31 PM	Helium MFC set to  500.000000
7/16/2010	12:02:31 PM	H2 MFC set to  0.000000
7/16/2010	12:02:31 PM	BCl3 MFC set to  0.000000
7/16/2010	12:02:31 PM	PHl3 MFC set to  0.000000
7/16/2010	12:02:31 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:02:31 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:02:31 PM	Tube furnace set to 0
7/16/2010	12:03:14 PM	Helium valve closed
7/16/2010	12:03:14 PM	H2 valve closed
7/16/2010	12:03:14 PM	BCl3 valve closed
7/16/2010	12:03:14 PM	PH3 valve closed
7/16/2010	12:03:14 PM	SiCl4 pre valve closed
7/16/2010	12:03:14 PM	SiCl4 post valve closed
7/16/2010	12:03:14 PM	Main Vac valve closed
7/16/2010	12:03:14 PM	Bypass valve closed
7/16/2010	12:03:14 PM	Bubbler valve closed
7/16/2010	12:03:14 PM	Helium MFC set to  0.000000
7/16/2010	12:03:14 PM	H2 MFC set to  0.000000
7/16/2010	12:03:14 PM	BCl3 MFC set to  0.000000
7/16/2010	12:03:14 PM	PHl3 MFC set to  0.000000
7/16/2010	12:03:14 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:03:14 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:03:14 PM	Tube furnace set to 0
7/16/2010	12:03:29 PM	Helium valve closed
7/16/2010	12:03:29 PM	H2 valve closed
7/16/2010	12:03:29 PM	BCl3 valve closed
7/16/2010	12:03:29 PM	PH3 valve closed
7/16/2010	12:03:29 PM	SiCl4 pre valve closed
7/16/2010	12:03:29 PM	SiCl4 post valve closed
7/16/2010	12:03:29 PM	Main Vac valve closed
7/16/2010	12:03:29 PM	Bubbler valve closed
7/16/2010	12:03:29 PM	Bypass valve opened
7/16/2010	12:03:29 PM	Helium MFC set to  0.000000
7/16/2010	12:03:29 PM	H2 MFC set to  0.000000
7/16/2010	12:03:29 PM	BCl3 MFC set to  0.000000
7/16/2010	12:03:29 PM	PHl3 MFC set to  0.000000
7/16/2010	12:03:29 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:03:29 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:03:29 PM	Tube furnace set to 0
7/16/2010	12:03:50 PM	Helium valve closed
7/16/2010	12:03:50 PM	H2 valve closed
7/16/2010	12:03:50 PM	BCl3 valve closed
7/16/2010	12:03:50 PM	PH3 valve closed
7/16/2010	12:03:50 PM	SiCl4 pre valve closed
7/16/2010	12:03:50 PM	SiCl4 post valve closed
7/16/2010	12:03:50 PM	Bubbler valve closed
7/16/2010	12:03:50 PM	Main Vac valve opened
7/16/2010	12:03:50 PM	Bypass valve opened
7/16/2010	12:03:50 PM	Helium MFC set to  0.000000
7/16/2010	12:03:50 PM	H2 MFC set to  0.000000
7/16/2010	12:03:50 PM	BCl3 MFC set to  0.000000
7/16/2010	12:03:50 PM	PHl3 MFC set to  0.000000
7/16/2010	12:03:50 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:03:50 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:03:51 PM	Tube furnace set to 0
7/16/2010	12:08:51 PM	H2 valve closed
7/16/2010	12:08:51 PM	BCl3 valve closed
7/16/2010	12:08:51 PM	PH3 valve closed
7/16/2010	12:08:51 PM	SiCl4 pre valve closed
7/16/2010	12:08:51 PM	SiCl4 post valve closed
7/16/2010	12:08:51 PM	Main Vac valve closed
7/16/2010	12:08:51 PM	Bypass valve closed
7/16/2010	12:08:51 PM	Bubbler valve closed
7/16/2010	12:08:51 PM	Helium valve opened
7/16/2010	12:08:51 PM	Helium MFC set to  500.000000
7/16/2010	12:08:51 PM	H2 MFC set to  0.000000
7/16/2010	12:08:51 PM	BCl3 MFC set to  0.000000
7/16/2010	12:08:51 PM	PHl3 MFC set to  0.000000
7/16/2010	12:08:51 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:08:51 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:08:51 PM	Tube furnace set to 0
7/16/2010	12:10:10 PM	Helium valve closed
7/16/2010	12:10:10 PM	H2 valve closed
7/16/2010	12:10:10 PM	BCl3 valve closed
7/16/2010	12:10:10 PM	PH3 valve closed
7/16/2010	12:10:10 PM	SiCl4 pre valve closed
7/16/2010	12:10:10 PM	SiCl4 post valve closed
7/16/2010	12:10:10 PM	Main Vac valve closed
7/16/2010	12:10:10 PM	Bypass valve closed
7/16/2010	12:10:10 PM	Bubbler valve closed
7/16/2010	12:10:10 PM	Helium MFC set to  0.000000
7/16/2010	12:10:10 PM	H2 MFC set to  0.000000
7/16/2010	12:10:10 PM	BCl3 MFC set to  0.000000
7/16/2010	12:10:10 PM	PHl3 MFC set to  0.000000
7/16/2010	12:10:10 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:10:10 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:10:10 PM	Tube furnace set to 0
7/16/2010	12:10:25 PM	Helium valve closed
7/16/2010	12:10:25 PM	H2 valve closed
7/16/2010	12:10:25 PM	BCl3 valve closed
7/16/2010	12:10:25 PM	PH3 valve closed
7/16/2010	12:10:25 PM	SiCl4 pre valve closed
7/16/2010	12:10:25 PM	SiCl4 post valve closed
7/16/2010	12:10:25 PM	Main Vac valve closed
7/16/2010	12:10:25 PM	Bubbler valve closed
7/16/2010	12:10:25 PM	Bypass valve opened
7/16/2010	12:10:25 PM	Helium MFC set to  0.000000
7/16/2010	12:10:25 PM	H2 MFC set to  0.000000
7/16/2010	12:10:25 PM	BCl3 MFC set to  0.000000
7/16/2010	12:10:25 PM	PHl3 MFC set to  0.000000
7/16/2010	12:10:25 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:10:25 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:10:25 PM	Tube furnace set to 0
7/16/2010	12:10:50 PM	Helium valve closed
7/16/2010	12:10:50 PM	H2 valve closed
7/16/2010	12:10:50 PM	BCl3 valve closed
7/16/2010	12:10:50 PM	PH3 valve closed
7/16/2010	12:10:50 PM	SiCl4 pre valve closed
7/16/2010	12:10:50 PM	SiCl4 post valve closed
7/16/2010	12:10:50 PM	Bubbler valve closed
7/16/2010	12:10:50 PM	Main Vac valve opened
7/16/2010	12:10:50 PM	Bypass valve opened
7/16/2010	12:10:50 PM	Helium MFC set to  0.000000
7/16/2010	12:10:50 PM	H2 MFC set to  0.000000
7/16/2010	12:10:50 PM	BCl3 MFC set to  0.000000
7/16/2010	12:10:50 PM	PHl3 MFC set to  0.000000
7/16/2010	12:10:50 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:10:50 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:10:50 PM	Tube furnace set to 0
7/16/2010	12:15:50 PM	H2 valve closed
7/16/2010	12:15:50 PM	BCl3 valve closed
7/16/2010	12:15:50 PM	PH3 valve closed
7/16/2010	12:15:50 PM	SiCl4 pre valve closed
7/16/2010	12:15:50 PM	SiCl4 post valve closed
7/16/2010	12:15:50 PM	Main Vac valve closed
7/16/2010	12:15:50 PM	Bypass valve closed
7/16/2010	12:15:50 PM	Bubbler valve closed
7/16/2010	12:15:50 PM	Helium valve opened
7/16/2010	12:15:50 PM	Helium MFC set to  500.000000
7/16/2010	12:15:50 PM	H2 MFC set to  0.000000
7/16/2010	12:15:50 PM	BCl3 MFC set to  0.000000
7/16/2010	12:15:50 PM	PHl3 MFC set to  0.000000
7/16/2010	12:15:50 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:15:50 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:15:51 PM	Tube furnace set to 0
7/16/2010	12:17:10 PM	Helium valve closed
7/16/2010	12:17:10 PM	H2 valve closed
7/16/2010	12:17:10 PM	BCl3 valve closed
7/16/2010	12:17:10 PM	PH3 valve closed
7/16/2010	12:17:10 PM	SiCl4 pre valve closed
7/16/2010	12:17:10 PM	SiCl4 post valve closed
7/16/2010	12:17:10 PM	Main Vac valve closed
7/16/2010	12:17:10 PM	Bypass valve closed
7/16/2010	12:17:10 PM	Bubbler valve closed
7/16/2010	12:17:10 PM	Helium MFC set to  0.000000
7/16/2010	12:17:10 PM	H2 MFC set to  0.000000
7/16/2010	12:17:10 PM	BCl3 MFC set to  0.000000
7/16/2010	12:17:10 PM	PHl3 MFC set to  0.000000
7/16/2010	12:17:10 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:17:10 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:17:11 PM	Tube furnace set to 0
7/16/2010	12:17:26 PM	Helium valve closed
7/16/2010	12:17:26 PM	H2 valve closed
7/16/2010	12:17:26 PM	BCl3 valve closed
7/16/2010	12:17:26 PM	PH3 valve closed
7/16/2010	12:17:26 PM	SiCl4 pre valve closed
7/16/2010	12:17:26 PM	SiCl4 post valve closed
7/16/2010	12:17:26 PM	Main Vac valve closed
7/16/2010	12:17:26 PM	Bubbler valve closed
7/16/2010	12:17:26 PM	Bypass valve opened
7/16/2010	12:17:26 PM	Helium MFC set to  0.000000
7/16/2010	12:17:26 PM	H2 MFC set to  0.000000
7/16/2010	12:17:26 PM	BCl3 MFC set to  0.000000
7/16/2010	12:17:26 PM	PHl3 MFC set to  0.000000
7/16/2010	12:17:26 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:17:26 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:17:26 PM	Tube furnace set to 0
7/16/2010	12:17:51 PM	Helium valve closed
7/16/2010	12:17:51 PM	H2 valve closed
7/16/2010	12:17:51 PM	BCl3 valve closed
7/16/2010	12:17:51 PM	PH3 valve closed
7/16/2010	12:17:51 PM	SiCl4 pre valve closed
7/16/2010	12:17:51 PM	SiCl4 post valve closed
7/16/2010	12:17:51 PM	Bubbler valve closed
7/16/2010	12:17:51 PM	Main Vac valve opened
7/16/2010	12:17:51 PM	Bypass valve opened
7/16/2010	12:17:51 PM	Helium MFC set to  0.000000
7/16/2010	12:17:51 PM	H2 MFC set to  0.000000
7/16/2010	12:17:51 PM	BCl3 MFC set to  0.000000
7/16/2010	12:17:51 PM	PHl3 MFC set to  0.000000
7/16/2010	12:17:51 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:17:51 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:17:51 PM	Tube furnace set to 0
7/16/2010	12:22:51 PM	Helium valve closed
7/16/2010	12:22:51 PM	H2 valve closed
7/16/2010	12:22:51 PM	BCl3 valve closed
7/16/2010	12:22:51 PM	PH3 valve closed
7/16/2010	12:22:51 PM	SiCl4 pre valve closed
7/16/2010	12:22:51 PM	SiCl4 post valve closed
7/16/2010	12:22:51 PM	Bubbler valve closed
7/16/2010	12:22:51 PM	Main Vac valve opened
7/16/2010	12:22:51 PM	Bypass valve opened
7/16/2010	12:22:51 PM	Helium MFC set to  0.000000
7/16/2010	12:22:51 PM	H2 MFC set to  0.000000
7/16/2010	12:22:51 PM	BCl3 MFC set to  0.000000
7/16/2010	12:22:51 PM	PHl3 MFC set to  0.000000
7/16/2010	12:22:51 PM	SiCl4 MFC set to  0.000000
7/16/2010	12:22:51 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	12:22:51 PM	Tube furnace set to 0
7/16/2010	12:22:52 PM	Run finished at 12:22 PM
7/16/2010	12:22:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/16/2010	1:06:18 PM	Main Vac valve closed
7/16/2010	1:06:19 PM	Bypass valve closed
7/16/2010	1:06:26 PM	Bypass valve opened
7/16/2010	1:06:27 PM	Main Vac valve opened
7/16/2010	1:06:50 PM	Recipe started at 1:06 PM
7/16/2010	1:06:50 PM	Helium valve closed
7/16/2010	1:06:50 PM	BCl3 valve closed
7/16/2010	1:06:50 PM	PH3 valve closed
7/16/2010	1:06:50 PM	SiCl4 pre valve closed
7/16/2010	1:06:50 PM	SiCl4 post valve closed
7/16/2010	1:06:50 PM	Main Vac valve closed
7/16/2010	1:06:50 PM	Bypass valve closed
7/16/2010	1:06:50 PM	Bubbler valve closed
7/16/2010	1:06:50 PM	H2 valve opened
7/16/2010	1:06:50 PM	Helium MFC set to  0.000000
7/16/2010	1:06:50 PM	H2 MFC set to  500.000000
7/16/2010	1:06:50 PM	BCl3 MFC set to  0.000000
7/16/2010	1:06:50 PM	PHl3 MFC set to  0.000000
7/16/2010	1:06:50 PM	SiCl4 MFC set to  0.000000
7/16/2010	1:06:50 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	1:06:50 PM	Tube furnace set to 0
7/16/2010	1:08:12 PM	Helium valve closed
7/16/2010	1:08:12 PM	BCl3 valve closed
7/16/2010	1:08:12 PM	PH3 valve closed
7/16/2010	1:08:12 PM	SiCl4 pre valve closed
7/16/2010	1:08:12 PM	SiCl4 post valve closed
7/16/2010	1:08:12 PM	Main Vac valve closed
7/16/2010	1:08:12 PM	Bypass valve closed
7/16/2010	1:08:12 PM	H2 valve opened
7/16/2010	1:08:12 PM	Bubbler valve opened
7/16/2010	1:08:12 PM	Helium MFC set to  0.000000
7/16/2010	1:08:12 PM	H2 MFC set to  500.000000
7/16/2010	1:08:12 PM	BCl3 MFC set to  0.000000
7/16/2010	1:08:12 PM	PHl3 MFC set to  0.000000
7/16/2010	1:08:12 PM	SiCl4 MFC set to  0.000000
7/16/2010	1:08:12 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	1:08:12 PM	Tube furnace set to 1000
7/16/2010	1:28:12 PM	Helium valve closed
7/16/2010	1:28:12 PM	PH3 valve closed
7/16/2010	1:28:12 PM	Main Vac valve closed
7/16/2010	1:28:12 PM	Bypass valve closed
7/16/2010	1:28:12 PM	H2 valve opened
7/16/2010	1:28:12 PM	BCl3 valve opened
7/16/2010	1:28:12 PM	SiCl4 pre valve opened
7/16/2010	1:28:12 PM	SiCl4 post valve opened
7/16/2010	1:28:12 PM	Bubbler valve opened
7/16/2010	1:28:12 PM	Helium MFC set to  0.000000
7/16/2010	1:28:12 PM	H2 MFC set to  500.000000
7/16/2010	1:28:12 PM	BCl3 MFC set to  12.000000
7/16/2010	1:28:12 PM	PHl3 MFC set to  0.000000
7/16/2010	1:28:12 PM	SiCl4 MFC set to  50.000000
7/16/2010	1:28:12 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	1:28:12 PM	Tube furnace set to 1000
7/16/2010	1:43:12 PM	H2 valve closed
7/16/2010	1:43:12 PM	BCl3 valve closed
7/16/2010	1:43:12 PM	PH3 valve closed
7/16/2010	1:43:12 PM	SiCl4 pre valve closed
7/16/2010	1:43:12 PM	SiCl4 post valve closed
7/16/2010	1:43:12 PM	Main Vac valve closed
7/16/2010	1:43:12 PM	Bypass valve closed
7/16/2010	1:43:12 PM	Helium valve opened
7/16/2010	1:43:12 PM	Bubbler valve opened
7/16/2010	1:43:12 PM	Helium MFC set to  500.000000
7/16/2010	1:43:12 PM	H2 MFC set to  0.000000
7/16/2010	1:43:12 PM	BCl3 MFC set to  0.000000
7/16/2010	1:43:12 PM	PHl3 MFC set to  0.000000
7/16/2010	1:43:12 PM	SiCl4 MFC set to  0.000000
7/16/2010	1:43:12 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	1:43:12 PM	Tube furnace set to 0
7/16/2010	2:08:12 PM	Helium valve closed
7/16/2010	2:08:12 PM	H2 valve closed
7/16/2010	2:08:12 PM	BCl3 valve closed
7/16/2010	2:08:12 PM	PH3 valve closed
7/16/2010	2:08:12 PM	SiCl4 pre valve closed
7/16/2010	2:08:12 PM	SiCl4 post valve closed
7/16/2010	2:08:12 PM	Main Vac valve closed
7/16/2010	2:08:12 PM	Bypass valve closed
7/16/2010	2:08:12 PM	Bubbler valve closed
7/16/2010	2:08:12 PM	Helium MFC set to  0.000000
7/16/2010	2:08:12 PM	H2 MFC set to  0.000000
7/16/2010	2:08:12 PM	BCl3 MFC set to  0.000000
7/16/2010	2:08:12 PM	PHl3 MFC set to  0.000000
7/16/2010	2:08:12 PM	SiCl4 MFC set to  0.000000
7/16/2010	2:08:12 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	2:08:13 PM	Tube furnace set to 0
7/16/2010	2:08:13 PM	Run finished at 2:08 PM
7/16/2010	2:17:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	2:17:48 PM	Recipe started at 2:17 PM
7/16/2010	2:17:48 PM	H2 valve closed
7/16/2010	2:17:48 PM	BCl3 valve closed
7/16/2010	2:17:48 PM	PH3 valve closed
7/16/2010	2:17:48 PM	SiCl4 pre valve closed
7/16/2010	2:17:48 PM	SiCl4 post valve closed
7/16/2010	2:17:48 PM	Main Vac valve closed
7/16/2010	2:17:48 PM	Bypass valve closed
7/16/2010	2:17:48 PM	Bubbler valve closed
7/16/2010	2:17:48 PM	Helium valve opened
7/16/2010	2:17:48 PM	Helium MFC set to  500.000000
7/16/2010	2:17:48 PM	H2 MFC set to  0.000000
7/16/2010	2:17:48 PM	BCl3 MFC set to  0.000000
7/16/2010	2:17:48 PM	PHl3 MFC set to  0.000000
7/16/2010	2:17:48 PM	SiCl4 MFC set to  0.000000
7/16/2010	2:17:48 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	2:17:49 PM	Tube furnace set to 0
7/16/2010	2:17:50 PM	Helium valve closed
7/16/2010	2:17:50 PM	H2 valve closed
7/16/2010	2:17:50 PM	BCl3 valve closed
7/16/2010	2:17:50 PM	PH3 valve closed
7/16/2010	2:17:50 PM	SiCl4 pre valve closed
7/16/2010	2:17:50 PM	SiCl4 post valve closed
7/16/2010	2:17:50 PM	Main Vac valve closed
7/16/2010	2:17:50 PM	Bypass valve closed
7/16/2010	2:17:50 PM	Bubbler valve closed
7/16/2010	2:17:50 PM	Helium MFC set to  0.000000
7/16/2010	2:17:50 PM	H2 MFC set to  0.000000
7/16/2010	2:17:50 PM	BCl3 MFC set to  0.000000
7/16/2010	2:17:50 PM	PHl3 MFC set to  0.000000
7/16/2010	2:17:50 PM	SiCl4 MFC set to  0.000000
7/16/2010	2:17:50 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	2:17:51 PM	Tube furnace set to 0
7/16/2010	2:17:51 PM	Run finished at 2:17 PM
7/16/2010	2:17:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	2:19:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	2:19:51 PM	Recipe started at 2:19 PM
7/16/2010	2:19:51 PM	Helium valve closed
7/16/2010	2:19:51 PM	H2 valve closed
7/16/2010	2:19:51 PM	BCl3 valve closed
7/16/2010	2:19:51 PM	PH3 valve closed
7/16/2010	2:19:51 PM	SiCl4 pre valve closed
7/16/2010	2:19:51 PM	SiCl4 post valve closed
7/16/2010	2:19:51 PM	Main Vac valve closed
7/16/2010	2:19:51 PM	Bubbler valve closed
7/16/2010	2:19:51 PM	Bypass valve opened
7/16/2010	2:19:51 PM	Helium MFC set to  0.000000
7/16/2010	2:19:51 PM	H2 MFC set to  0.000000
7/16/2010	2:19:51 PM	BCl3 MFC set to  0.000000
7/16/2010	2:19:51 PM	PHl3 MFC set to  0.000000
7/16/2010	2:19:51 PM	SiCl4 MFC set to  0.000000
7/16/2010	2:19:51 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	2:19:51 PM	Tube furnace set to 0
7/16/2010	2:20:25 PM	Helium valve closed
7/16/2010	2:20:25 PM	H2 valve closed
7/16/2010	2:20:25 PM	BCl3 valve closed
7/16/2010	2:20:25 PM	PH3 valve closed
7/16/2010	2:20:25 PM	SiCl4 pre valve closed
7/16/2010	2:20:25 PM	SiCl4 post valve closed
7/16/2010	2:20:25 PM	Bubbler valve closed
7/16/2010	2:20:25 PM	Main Vac valve opened
7/16/2010	2:20:25 PM	Bypass valve opened
7/16/2010	2:20:25 PM	Helium MFC set to  0.000000
7/16/2010	2:20:25 PM	H2 MFC set to  0.000000
7/16/2010	2:20:25 PM	BCl3 MFC set to  0.000000
7/16/2010	2:20:25 PM	PHl3 MFC set to  0.000000
7/16/2010	2:20:25 PM	SiCl4 MFC set to  0.000000
7/16/2010	2:20:25 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	2:20:25 PM	Tube furnace set to 0
7/16/2010	2:20:26 PM	Run finished at 2:20 PM
7/16/2010	2:20:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	3:01:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	3:01:39 PM	Recipe started at 3:01 PM
7/16/2010	3:01:40 PM	H2 valve closed
7/16/2010	3:01:40 PM	BCl3 valve closed
7/16/2010	3:01:40 PM	PH3 valve closed
7/16/2010	3:01:40 PM	SiCl4 pre valve closed
7/16/2010	3:01:40 PM	SiCl4 post valve closed
7/16/2010	3:01:40 PM	Main Vac valve closed
7/16/2010	3:01:40 PM	Bypass valve closed
7/16/2010	3:01:40 PM	Bubbler valve closed
7/16/2010	3:01:40 PM	Helium valve opened
7/16/2010	3:01:40 PM	Helium MFC set to  500.000000
7/16/2010	3:01:40 PM	H2 MFC set to  0.000000
7/16/2010	3:01:40 PM	BCl3 MFC set to  0.000000
7/16/2010	3:01:40 PM	PHl3 MFC set to  0.000000
7/16/2010	3:01:40 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:01:40 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:01:40 PM	Tube furnace set to 0
7/16/2010	3:02:58 PM	Helium valve closed
7/16/2010	3:02:58 PM	H2 valve closed
7/16/2010	3:02:58 PM	BCl3 valve closed
7/16/2010	3:02:58 PM	PH3 valve closed
7/16/2010	3:02:58 PM	SiCl4 pre valve closed
7/16/2010	3:02:58 PM	SiCl4 post valve closed
7/16/2010	3:02:58 PM	Main Vac valve closed
7/16/2010	3:02:58 PM	Bypass valve closed
7/16/2010	3:02:58 PM	Bubbler valve closed
7/16/2010	3:02:58 PM	Helium MFC set to  0.000000
7/16/2010	3:02:58 PM	H2 MFC set to  0.000000
7/16/2010	3:02:58 PM	BCl3 MFC set to  0.000000
7/16/2010	3:02:58 PM	PHl3 MFC set to  0.000000
7/16/2010	3:02:58 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:02:58 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:02:59 PM	Tube furnace set to 0
7/16/2010	3:02:59 PM	Run finished at 3:02 PM
7/16/2010	3:02:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	3:09:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	3:09:47 PM	Recipe started at 3:09 PM
7/16/2010	3:09:47 PM	Helium valve closed
7/16/2010	3:09:47 PM	H2 valve closed
7/16/2010	3:09:47 PM	BCl3 valve closed
7/16/2010	3:09:47 PM	PH3 valve closed
7/16/2010	3:09:47 PM	SiCl4 pre valve closed
7/16/2010	3:09:47 PM	SiCl4 post valve closed
7/16/2010	3:09:47 PM	Main Vac valve closed
7/16/2010	3:09:47 PM	Bubbler valve closed
7/16/2010	3:09:47 PM	Bypass valve opened
7/16/2010	3:09:47 PM	Helium MFC set to  0.000000
7/16/2010	3:09:47 PM	H2 MFC set to  0.000000
7/16/2010	3:09:47 PM	BCl3 MFC set to  0.000000
7/16/2010	3:09:47 PM	PHl3 MFC set to  0.000000
7/16/2010	3:09:47 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:09:47 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:09:48 PM	Tube furnace set to 0
7/16/2010	3:10:22 PM	Helium valve closed
7/16/2010	3:10:22 PM	H2 valve closed
7/16/2010	3:10:22 PM	BCl3 valve closed
7/16/2010	3:10:22 PM	PH3 valve closed
7/16/2010	3:10:22 PM	SiCl4 pre valve closed
7/16/2010	3:10:22 PM	SiCl4 post valve closed
7/16/2010	3:10:22 PM	Bubbler valve closed
7/16/2010	3:10:22 PM	Main Vac valve opened
7/16/2010	3:10:22 PM	Bypass valve opened
7/16/2010	3:10:22 PM	Helium MFC set to  0.000000
7/16/2010	3:10:22 PM	H2 MFC set to  0.000000
7/16/2010	3:10:22 PM	BCl3 MFC set to  0.000000
7/16/2010	3:10:22 PM	PHl3 MFC set to  0.000000
7/16/2010	3:10:22 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:10:22 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:10:22 PM	Tube furnace set to 0
7/16/2010	3:10:22 PM	Run finished at 3:10 PM
7/16/2010	3:10:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	3:10:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/16/2010	3:11:00 PM	Recipe started at 3:10 PM
7/16/2010	3:11:00 PM	Helium valve closed
7/16/2010	3:11:00 PM	H2 valve closed
7/16/2010	3:11:00 PM	BCl3 valve closed
7/16/2010	3:11:00 PM	PH3 valve closed
7/16/2010	3:11:00 PM	SiCl4 pre valve closed
7/16/2010	3:11:00 PM	SiCl4 post valve closed
7/16/2010	3:11:00 PM	Main Vac valve closed
7/16/2010	3:11:00 PM	Bubbler valve closed
7/16/2010	3:11:00 PM	Bypass valve opened
7/16/2010	3:11:00 PM	Helium MFC set to  0.000000
7/16/2010	3:11:00 PM	H2 MFC set to  0.000000
7/16/2010	3:11:00 PM	BCl3 MFC set to  0.000000
7/16/2010	3:11:00 PM	PHl3 MFC set to  0.000000
7/16/2010	3:11:00 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:11:00 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:11:00 PM	Tube furnace set to 0
7/16/2010	3:11:01 PM	Helium valve closed
7/16/2010	3:11:01 PM	H2 valve closed
7/16/2010	3:11:01 PM	BCl3 valve closed
7/16/2010	3:11:01 PM	PH3 valve closed
7/16/2010	3:11:01 PM	SiCl4 pre valve closed
7/16/2010	3:11:01 PM	SiCl4 post valve closed
7/16/2010	3:11:01 PM	Bubbler valve closed
7/16/2010	3:11:01 PM	Main Vac valve opened
7/16/2010	3:11:01 PM	Bypass valve opened
7/16/2010	3:11:01 PM	Helium MFC set to  0.000000
7/16/2010	3:11:01 PM	H2 MFC set to  0.000000
7/16/2010	3:11:01 PM	BCl3 MFC set to  0.000000
7/16/2010	3:11:01 PM	PHl3 MFC set to  0.000000
7/16/2010	3:11:01 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:11:01 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:11:01 PM	Tube furnace set to 0
7/16/2010	3:11:07 PM	H2 valve closed
7/16/2010	3:11:07 PM	BCl3 valve closed
7/16/2010	3:11:07 PM	PH3 valve closed
7/16/2010	3:11:07 PM	SiCl4 pre valve closed
7/16/2010	3:11:07 PM	SiCl4 post valve closed
7/16/2010	3:11:07 PM	Bubbler valve closed
7/16/2010	3:11:07 PM	Helium valve opened
7/16/2010	3:11:07 PM	Main Vac valve opened
7/16/2010	3:11:07 PM	Bypass valve opened
7/16/2010	3:11:07 PM	Helium MFC set to  100.000000
7/16/2010	3:11:07 PM	H2 MFC set to  0.000000
7/16/2010	3:11:07 PM	BCl3 MFC set to  0.000000
7/16/2010	3:11:07 PM	PHl3 MFC set to  0.000000
7/16/2010	3:11:07 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:11:07 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:11:07 PM	Tube furnace set to 0
7/16/2010	3:16:43 PM	Helium valve closed
7/16/2010	3:16:43 PM	H2 valve closed
7/16/2010	3:16:43 PM	BCl3 valve closed
7/16/2010	3:16:43 PM	PH3 valve closed
7/16/2010	3:16:43 PM	SiCl4 pre valve closed
7/16/2010	3:16:43 PM	SiCl4 post valve closed
7/16/2010	3:16:43 PM	Bubbler valve closed
7/16/2010	3:16:43 PM	Main Vac valve opened
7/16/2010	3:16:43 PM	Bypass valve opened
7/16/2010	3:16:43 PM	Helium MFC set to  0.000000
7/16/2010	3:16:43 PM	H2 MFC set to  0.000000
7/16/2010	3:16:43 PM	BCl3 MFC set to  0.000000
7/16/2010	3:16:43 PM	PHl3 MFC set to  0.000000
7/16/2010	3:16:43 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:16:43 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:16:43 PM	Tube furnace set to 0
7/16/2010	3:17:37 PM	H2 valve closed
7/16/2010	3:17:37 PM	BCl3 valve closed
7/16/2010	3:17:37 PM	PH3 valve closed
7/16/2010	3:17:37 PM	SiCl4 pre valve closed
7/16/2010	3:17:37 PM	SiCl4 post valve closed
7/16/2010	3:17:37 PM	Bubbler valve closed
7/16/2010	3:17:37 PM	Helium valve opened
7/16/2010	3:17:37 PM	Main Vac valve opened
7/16/2010	3:17:37 PM	Bypass valve opened
7/16/2010	3:17:37 PM	Helium MFC set to  100.000000
7/16/2010	3:17:37 PM	H2 MFC set to  0.000000
7/16/2010	3:17:37 PM	BCl3 MFC set to  0.000000
7/16/2010	3:17:37 PM	PHl3 MFC set to  0.000000
7/16/2010	3:17:37 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:17:37 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:17:37 PM	Tube furnace set to 0
7/16/2010	3:20:12 PM	Helium valve closed
7/16/2010	3:20:12 PM	H2 valve closed
7/16/2010	3:20:12 PM	BCl3 valve closed
7/16/2010	3:20:12 PM	PH3 valve closed
7/16/2010	3:20:12 PM	SiCl4 pre valve closed
7/16/2010	3:20:12 PM	SiCl4 post valve closed
7/16/2010	3:20:12 PM	Bubbler valve closed
7/16/2010	3:20:12 PM	Main Vac valve opened
7/16/2010	3:20:12 PM	Bypass valve opened
7/16/2010	3:20:12 PM	Helium MFC set to  0.000000
7/16/2010	3:20:12 PM	H2 MFC set to  0.000000
7/16/2010	3:20:12 PM	BCl3 MFC set to  0.000000
7/16/2010	3:20:12 PM	PHl3 MFC set to  0.000000
7/16/2010	3:20:12 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:20:12 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:20:12 PM	Tube furnace set to 0
7/16/2010	3:20:58 PM	H2 valve closed
7/16/2010	3:20:58 PM	BCl3 valve closed
7/16/2010	3:20:58 PM	PH3 valve closed
7/16/2010	3:20:58 PM	SiCl4 pre valve closed
7/16/2010	3:20:58 PM	SiCl4 post valve closed
7/16/2010	3:20:58 PM	Bubbler valve closed
7/16/2010	3:20:58 PM	Helium valve opened
7/16/2010	3:20:58 PM	Main Vac valve opened
7/16/2010	3:20:58 PM	Bypass valve opened
7/16/2010	3:20:58 PM	Helium MFC set to  100.000000
7/16/2010	3:20:58 PM	H2 MFC set to  0.000000
7/16/2010	3:20:58 PM	BCl3 MFC set to  0.000000
7/16/2010	3:20:58 PM	PHl3 MFC set to  0.000000
7/16/2010	3:20:58 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:20:58 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:20:58 PM	Tube furnace set to 0
7/16/2010	3:27:39 PM	Helium valve closed
7/16/2010	3:27:39 PM	H2 valve closed
7/16/2010	3:27:39 PM	BCl3 valve closed
7/16/2010	3:27:39 PM	PH3 valve closed
7/16/2010	3:27:39 PM	SiCl4 pre valve closed
7/16/2010	3:27:39 PM	SiCl4 post valve closed
7/16/2010	3:27:39 PM	Bubbler valve closed
7/16/2010	3:27:39 PM	Main Vac valve opened
7/16/2010	3:27:39 PM	Bypass valve opened
7/16/2010	3:27:39 PM	Helium MFC set to  0.000000
7/16/2010	3:27:39 PM	H2 MFC set to  0.000000
7/16/2010	3:27:39 PM	BCl3 MFC set to  0.000000
7/16/2010	3:27:39 PM	PHl3 MFC set to  0.000000
7/16/2010	3:27:39 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:27:39 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:27:39 PM	Tube furnace set to 0
7/16/2010	3:27:40 PM	Run finished at 3:27 PM
7/16/2010	3:27:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/16/2010	3:30:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/16/2010	3:30:56 PM	Recipe started at 3:30 PM
7/16/2010	3:30:56 PM	Helium valve closed
7/16/2010	3:30:56 PM	H2 valve closed
7/16/2010	3:30:56 PM	BCl3 valve closed
7/16/2010	3:30:56 PM	PH3 valve closed
7/16/2010	3:30:56 PM	SiCl4 pre valve closed
7/16/2010	3:30:56 PM	SiCl4 post valve closed
7/16/2010	3:30:56 PM	Main Vac valve closed
7/16/2010	3:30:56 PM	Bubbler valve closed
7/16/2010	3:30:56 PM	Bypass valve opened
7/16/2010	3:30:56 PM	Helium MFC set to  0.000000
7/16/2010	3:30:56 PM	H2 MFC set to  0.000000
7/16/2010	3:30:56 PM	BCl3 MFC set to  0.000000
7/16/2010	3:30:56 PM	PHl3 MFC set to  0.000000
7/16/2010	3:30:56 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:30:56 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:30:57 PM	Tube furnace set to 0
7/16/2010	3:30:57 PM	Helium valve closed
7/16/2010	3:30:57 PM	H2 valve closed
7/16/2010	3:30:57 PM	BCl3 valve closed
7/16/2010	3:30:57 PM	PH3 valve closed
7/16/2010	3:30:57 PM	SiCl4 pre valve closed
7/16/2010	3:30:57 PM	SiCl4 post valve closed
7/16/2010	3:30:57 PM	Bubbler valve closed
7/16/2010	3:30:57 PM	Main Vac valve opened
7/16/2010	3:30:57 PM	Bypass valve opened
7/16/2010	3:30:57 PM	Helium MFC set to  0.000000
7/16/2010	3:30:57 PM	H2 MFC set to  0.000000
7/16/2010	3:30:57 PM	BCl3 MFC set to  0.000000
7/16/2010	3:30:57 PM	PHl3 MFC set to  0.000000
7/16/2010	3:30:57 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:30:57 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:30:57 PM	Tube furnace set to 0
7/16/2010	3:30:59 PM	H2 valve closed
7/16/2010	3:30:59 PM	BCl3 valve closed
7/16/2010	3:30:59 PM	PH3 valve closed
7/16/2010	3:30:59 PM	SiCl4 pre valve closed
7/16/2010	3:30:59 PM	SiCl4 post valve closed
7/16/2010	3:30:59 PM	Bubbler valve closed
7/16/2010	3:30:59 PM	Helium valve opened
7/16/2010	3:30:59 PM	Main Vac valve opened
7/16/2010	3:30:59 PM	Bypass valve opened
7/16/2010	3:30:59 PM	Helium MFC set to  100.000000
7/16/2010	3:30:59 PM	H2 MFC set to  0.000000
7/16/2010	3:30:59 PM	BCl3 MFC set to  0.000000
7/16/2010	3:30:59 PM	PHl3 MFC set to  0.000000
7/16/2010	3:30:59 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:30:59 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:30:59 PM	Tube furnace set to 0
7/16/2010	3:31:04 PM	Helium valve closed
7/16/2010	3:31:04 PM	H2 valve closed
7/16/2010	3:31:04 PM	BCl3 valve closed
7/16/2010	3:31:04 PM	PH3 valve closed
7/16/2010	3:31:04 PM	SiCl4 pre valve closed
7/16/2010	3:31:04 PM	SiCl4 post valve closed
7/16/2010	3:31:04 PM	Bubbler valve closed
7/16/2010	3:31:04 PM	Main Vac valve opened
7/16/2010	3:31:04 PM	Bypass valve opened
7/16/2010	3:31:04 PM	Helium MFC set to  0.000000
7/16/2010	3:31:04 PM	H2 MFC set to  0.000000
7/16/2010	3:31:04 PM	BCl3 MFC set to  0.000000
7/16/2010	3:31:04 PM	PHl3 MFC set to  0.000000
7/16/2010	3:31:04 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:31:04 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:31:04 PM	Tube furnace set to 0
7/16/2010	3:31:52 PM	H2 valve closed
7/16/2010	3:31:52 PM	BCl3 valve closed
7/16/2010	3:31:52 PM	PH3 valve closed
7/16/2010	3:31:52 PM	SiCl4 pre valve closed
7/16/2010	3:31:52 PM	SiCl4 post valve closed
7/16/2010	3:31:52 PM	Bubbler valve closed
7/16/2010	3:31:52 PM	Helium valve opened
7/16/2010	3:31:52 PM	Main Vac valve opened
7/16/2010	3:31:52 PM	Bypass valve opened
7/16/2010	3:31:52 PM	Helium MFC set to  100.000000
7/16/2010	3:31:52 PM	H2 MFC set to  0.000000
7/16/2010	3:31:52 PM	BCl3 MFC set to  0.000000
7/16/2010	3:31:52 PM	PHl3 MFC set to  0.000000
7/16/2010	3:31:52 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:31:52 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:31:52 PM	Tube furnace set to 0
7/16/2010	3:33:52 PM	Helium valve closed
7/16/2010	3:33:52 PM	H2 valve closed
7/16/2010	3:33:52 PM	BCl3 valve closed
7/16/2010	3:33:52 PM	PH3 valve closed
7/16/2010	3:33:52 PM	SiCl4 pre valve closed
7/16/2010	3:33:52 PM	SiCl4 post valve closed
7/16/2010	3:33:52 PM	Bubbler valve closed
7/16/2010	3:33:52 PM	Main Vac valve opened
7/16/2010	3:33:52 PM	Bypass valve opened
7/16/2010	3:33:52 PM	Helium MFC set to  0.000000
7/16/2010	3:33:52 PM	H2 MFC set to  0.000000
7/16/2010	3:33:52 PM	BCl3 MFC set to  0.000000
7/16/2010	3:33:52 PM	PHl3 MFC set to  0.000000
7/16/2010	3:33:52 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:33:52 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:33:52 PM	Tube furnace set to 0
7/16/2010	3:34:41 PM	Run aborted at 3:34 PM
7/16/2010	3:34:41 PM	Helium valve closed
7/16/2010	3:34:41 PM	H2 valve closed
7/16/2010	3:34:41 PM	BCl3 valve closed
7/16/2010	3:34:41 PM	PH3 valve closed
7/16/2010	3:34:41 PM	SiCl4 pre valve closed
7/16/2010	3:34:41 PM	SiCl4 post valve closed
7/16/2010	3:34:41 PM	Bypass valve closed
7/16/2010	3:34:41 PM	Main Vac valve closed
7/16/2010	3:34:41 PM	Bubbler valve closed
7/16/2010	3:34:41 PM	Helium MFC set to  0.000000
7/16/2010	3:34:41 PM	H2 MFC set to  0.000000
7/16/2010	3:34:41 PM	BCl3 MFC set to  0.000000
7/16/2010	3:34:41 PM	PHl3 MFC set to  0.000000
7/16/2010	3:34:41 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:34:41 PM	Tube furnace set to 0
7/16/2010	3:34:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/16/2010	3:34:54 PM	Bypass valve opened
7/16/2010	3:34:58 PM	Main Vac valve opened
7/16/2010	3:36:10 PM	Recipe started at 3:36 PM
7/16/2010	3:36:10 PM	Helium valve closed
7/16/2010	3:36:10 PM	BCl3 valve closed
7/16/2010	3:36:10 PM	PH3 valve closed
7/16/2010	3:36:10 PM	SiCl4 pre valve closed
7/16/2010	3:36:10 PM	SiCl4 post valve closed
7/16/2010	3:36:10 PM	Main Vac valve closed
7/16/2010	3:36:10 PM	Bypass valve closed
7/16/2010	3:36:10 PM	Bubbler valve closed
7/16/2010	3:36:10 PM	H2 valve opened
7/16/2010	3:36:10 PM	Helium MFC set to  0.000000
7/16/2010	3:36:10 PM	H2 MFC set to  500.000000
7/16/2010	3:36:10 PM	BCl3 MFC set to  0.000000
7/16/2010	3:36:10 PM	PHl3 MFC set to  0.000000
7/16/2010	3:36:10 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:36:10 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:36:10 PM	Tube furnace set to 0
7/16/2010	3:37:30 PM	Helium valve closed
7/16/2010	3:37:30 PM	BCl3 valve closed
7/16/2010	3:37:30 PM	PH3 valve closed
7/16/2010	3:37:30 PM	SiCl4 pre valve closed
7/16/2010	3:37:30 PM	SiCl4 post valve closed
7/16/2010	3:37:30 PM	Main Vac valve closed
7/16/2010	3:37:30 PM	Bypass valve closed
7/16/2010	3:37:30 PM	H2 valve opened
7/16/2010	3:37:30 PM	Bubbler valve opened
7/16/2010	3:37:30 PM	Helium MFC set to  0.000000
7/16/2010	3:37:30 PM	H2 MFC set to  500.000000
7/16/2010	3:37:30 PM	BCl3 MFC set to  0.000000
7/16/2010	3:37:30 PM	PHl3 MFC set to  0.000000
7/16/2010	3:37:30 PM	SiCl4 MFC set to  0.000000
7/16/2010	3:37:30 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:37:31 PM	Tube furnace set to 1000
7/16/2010	3:57:31 PM	Helium valve closed
7/16/2010	3:57:31 PM	BCl3 valve closed
7/16/2010	3:57:31 PM	PH3 valve closed
7/16/2010	3:57:31 PM	Main Vac valve closed
7/16/2010	3:57:31 PM	Bypass valve closed
7/16/2010	3:57:31 PM	H2 valve opened
7/16/2010	3:57:31 PM	SiCl4 pre valve opened
7/16/2010	3:57:31 PM	SiCl4 post valve opened
7/16/2010	3:57:31 PM	Bubbler valve opened
7/16/2010	3:57:31 PM	Helium MFC set to  0.000000
7/16/2010	3:57:31 PM	H2 MFC set to  500.000000
7/16/2010	3:57:31 PM	BCl3 MFC set to  0.000000
7/16/2010	3:57:31 PM	PHl3 MFC set to  0.000000
7/16/2010	3:57:31 PM	SiCl4 MFC set to  50.000000
7/16/2010	3:57:31 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	3:57:31 PM	Tube furnace set to 1000
7/16/2010	4:15:31 PM	H2 valve closed
7/16/2010	4:15:31 PM	BCl3 valve closed
7/16/2010	4:15:31 PM	PH3 valve closed
7/16/2010	4:15:31 PM	SiCl4 pre valve closed
7/16/2010	4:15:31 PM	SiCl4 post valve closed
7/16/2010	4:15:31 PM	Main Vac valve closed
7/16/2010	4:15:31 PM	Bypass valve closed
7/16/2010	4:15:31 PM	Helium valve opened
7/16/2010	4:15:31 PM	Bubbler valve opened
7/16/2010	4:15:31 PM	Helium MFC set to  500.000000
7/16/2010	4:15:31 PM	H2 MFC set to  0.000000
7/16/2010	4:15:31 PM	BCl3 MFC set to  0.000000
7/16/2010	4:15:31 PM	PHl3 MFC set to  0.000000
7/16/2010	4:15:31 PM	SiCl4 MFC set to  0.000000
7/16/2010	4:15:31 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	4:15:31 PM	Tube furnace set to 0
7/16/2010	4:40:31 PM	Helium valve closed
7/16/2010	4:40:31 PM	H2 valve closed
7/16/2010	4:40:31 PM	BCl3 valve closed
7/16/2010	4:40:31 PM	PH3 valve closed
7/16/2010	4:40:31 PM	SiCl4 pre valve closed
7/16/2010	4:40:31 PM	SiCl4 post valve closed
7/16/2010	4:40:31 PM	Main Vac valve closed
7/16/2010	4:40:31 PM	Bypass valve closed
7/16/2010	4:40:31 PM	Bubbler valve closed
7/16/2010	4:40:31 PM	Helium MFC set to  0.000000
7/16/2010	4:40:31 PM	H2 MFC set to  0.000000
7/16/2010	4:40:31 PM	BCl3 MFC set to  0.000000
7/16/2010	4:40:31 PM	PHl3 MFC set to  0.000000
7/16/2010	4:40:31 PM	SiCl4 MFC set to  0.000000
7/16/2010	4:40:31 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	4:40:31 PM	Tube furnace set to 0
7/16/2010	4:40:31 PM	Run finished at 4:40 PM
7/16/2010	4:48:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	4:48:11 PM	Recipe started at 4:48 PM
7/16/2010	4:48:11 PM	Helium valve closed
7/16/2010	4:48:11 PM	H2 valve closed
7/16/2010	4:48:11 PM	BCl3 valve closed
7/16/2010	4:48:11 PM	PH3 valve closed
7/16/2010	4:48:12 PM	SiCl4 pre valve closed
7/16/2010	4:48:12 PM	SiCl4 post valve closed
7/16/2010	4:48:12 PM	Main Vac valve closed
7/16/2010	4:48:12 PM	Bubbler valve closed
7/16/2010	4:48:12 PM	Bypass valve opened
7/16/2010	4:48:12 PM	Helium MFC set to  0.000000
7/16/2010	4:48:12 PM	H2 MFC set to  0.000000
7/16/2010	4:48:12 PM	BCl3 MFC set to  0.000000
7/16/2010	4:48:12 PM	PHl3 MFC set to  0.000000
7/16/2010	4:48:12 PM	SiCl4 MFC set to  0.000000
7/16/2010	4:48:12 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	4:48:12 PM	Tube furnace set to 0
7/16/2010	4:48:45 PM	Helium valve closed
7/16/2010	4:48:45 PM	H2 valve closed
7/16/2010	4:48:45 PM	BCl3 valve closed
7/16/2010	4:48:45 PM	PH3 valve closed
7/16/2010	4:48:45 PM	SiCl4 pre valve closed
7/16/2010	4:48:45 PM	SiCl4 post valve closed
7/16/2010	4:48:45 PM	Bubbler valve closed
7/16/2010	4:48:45 PM	Main Vac valve opened
7/16/2010	4:48:45 PM	Bypass valve opened
7/16/2010	4:48:45 PM	Helium MFC set to  0.000000
7/16/2010	4:48:45 PM	H2 MFC set to  0.000000
7/16/2010	4:48:45 PM	BCl3 MFC set to  0.000000
7/16/2010	4:48:45 PM	PHl3 MFC set to  0.000000
7/16/2010	4:48:45 PM	SiCl4 MFC set to  0.000000
7/16/2010	4:48:45 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	4:48:45 PM	Tube furnace set to 0
7/16/2010	4:48:46 PM	Run finished at 4:48 PM
7/16/2010	4:48:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	5:24:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	5:24:45 PM	Recipe started at 5:24 PM
7/16/2010	5:24:45 PM	H2 valve closed
7/16/2010	5:24:45 PM	BCl3 valve closed
7/16/2010	5:24:45 PM	PH3 valve closed
7/16/2010	5:24:45 PM	SiCl4 pre valve closed
7/16/2010	5:24:45 PM	SiCl4 post valve closed
7/16/2010	5:24:45 PM	Main Vac valve closed
7/16/2010	5:24:45 PM	Bypass valve closed
7/16/2010	5:24:45 PM	Bubbler valve closed
7/16/2010	5:24:45 PM	Helium valve opened
7/16/2010	5:24:45 PM	Helium MFC set to  500.000000
7/16/2010	5:24:45 PM	H2 MFC set to  0.000000
7/16/2010	5:24:45 PM	BCl3 MFC set to  0.000000
7/16/2010	5:24:45 PM	PHl3 MFC set to  0.000000
7/16/2010	5:24:45 PM	SiCl4 MFC set to  0.000000
7/16/2010	5:24:45 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	5:24:45 PM	Tube furnace set to 0
7/16/2010	5:26:04 PM	Helium valve closed
7/16/2010	5:26:04 PM	H2 valve closed
7/16/2010	5:26:04 PM	BCl3 valve closed
7/16/2010	5:26:04 PM	PH3 valve closed
7/16/2010	5:26:04 PM	SiCl4 pre valve closed
7/16/2010	5:26:04 PM	SiCl4 post valve closed
7/16/2010	5:26:04 PM	Main Vac valve closed
7/16/2010	5:26:04 PM	Bypass valve closed
7/16/2010	5:26:04 PM	Bubbler valve closed
7/16/2010	5:26:04 PM	Helium MFC set to  0.000000
7/16/2010	5:26:04 PM	H2 MFC set to  0.000000
7/16/2010	5:26:04 PM	BCl3 MFC set to  0.000000
7/16/2010	5:26:04 PM	PHl3 MFC set to  0.000000
7/16/2010	5:26:04 PM	SiCl4 MFC set to  0.000000
7/16/2010	5:26:04 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	5:26:04 PM	Tube furnace set to 0
7/16/2010	5:26:04 PM	Run finished at 5:26 PM
7/16/2010	5:26:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	5:26:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	5:26:51 PM	Recipe started at 5:26 PM
7/16/2010	5:26:51 PM	Helium valve closed
7/16/2010	5:26:51 PM	H2 valve closed
7/16/2010	5:26:51 PM	BCl3 valve closed
7/16/2010	5:26:51 PM	PH3 valve closed
7/16/2010	5:26:51 PM	SiCl4 pre valve closed
7/16/2010	5:26:51 PM	SiCl4 post valve closed
7/16/2010	5:26:51 PM	Main Vac valve closed
7/16/2010	5:26:51 PM	Bubbler valve closed
7/16/2010	5:26:51 PM	Bypass valve opened
7/16/2010	5:26:51 PM	Helium MFC set to  0.000000
7/16/2010	5:26:51 PM	H2 MFC set to  0.000000
7/16/2010	5:26:51 PM	BCl3 MFC set to  0.000000
7/16/2010	5:26:51 PM	PHl3 MFC set to  0.000000
7/16/2010	5:26:51 PM	SiCl4 MFC set to  0.000000
7/16/2010	5:26:51 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	5:26:52 PM	Tube furnace set to 0
7/16/2010	5:27:17 PM	Helium valve closed
7/16/2010	5:27:17 PM	H2 valve closed
7/16/2010	5:27:17 PM	BCl3 valve closed
7/16/2010	5:27:17 PM	PH3 valve closed
7/16/2010	5:27:17 PM	SiCl4 pre valve closed
7/16/2010	5:27:17 PM	SiCl4 post valve closed
7/16/2010	5:27:17 PM	Bubbler valve closed
7/16/2010	5:27:17 PM	Main Vac valve opened
7/16/2010	5:27:17 PM	Bypass valve opened
7/16/2010	5:27:17 PM	Helium MFC set to  0.000000
7/16/2010	5:27:17 PM	H2 MFC set to  0.000000
7/16/2010	5:27:17 PM	BCl3 MFC set to  0.000000
7/16/2010	5:27:17 PM	PHl3 MFC set to  0.000000
7/16/2010	5:27:17 PM	SiCl4 MFC set to  0.000000
7/16/2010	5:27:17 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	5:27:17 PM	Tube furnace set to 0
7/16/2010	5:27:17 PM	Run finished at 5:27 PM
7/16/2010	5:27:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	6:10:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	6:10:30 PM	Recipe started at 6:10 PM
7/16/2010	6:10:30 PM	H2 valve closed
7/16/2010	6:10:30 PM	BCl3 valve closed
7/16/2010	6:10:30 PM	PH3 valve closed
7/16/2010	6:10:30 PM	SiCl4 pre valve closed
7/16/2010	6:10:30 PM	SiCl4 post valve closed
7/16/2010	6:10:30 PM	Main Vac valve closed
7/16/2010	6:10:30 PM	Bypass valve closed
7/16/2010	6:10:30 PM	Bubbler valve closed
7/16/2010	6:10:30 PM	Helium valve opened
7/16/2010	6:10:30 PM	Helium MFC set to  500.000000
7/16/2010	6:10:30 PM	H2 MFC set to  0.000000
7/16/2010	6:10:30 PM	BCl3 MFC set to  0.000000
7/16/2010	6:10:30 PM	PHl3 MFC set to  0.000000
7/16/2010	6:10:30 PM	SiCl4 MFC set to  0.000000
7/16/2010	6:10:30 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	6:10:30 PM	Tube furnace set to 0
7/16/2010	6:11:49 PM	Helium valve closed
7/16/2010	6:11:49 PM	H2 valve closed
7/16/2010	6:11:49 PM	BCl3 valve closed
7/16/2010	6:11:49 PM	PH3 valve closed
7/16/2010	6:11:49 PM	SiCl4 pre valve closed
7/16/2010	6:11:49 PM	SiCl4 post valve closed
7/16/2010	6:11:49 PM	Main Vac valve closed
7/16/2010	6:11:49 PM	Bypass valve closed
7/16/2010	6:11:49 PM	Bubbler valve closed
7/16/2010	6:11:49 PM	Helium MFC set to  0.000000
7/16/2010	6:11:49 PM	H2 MFC set to  0.000000
7/16/2010	6:11:49 PM	BCl3 MFC set to  0.000000
7/16/2010	6:11:49 PM	PHl3 MFC set to  0.000000
7/16/2010	6:11:49 PM	SiCl4 MFC set to  0.000000
7/16/2010	6:11:49 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	6:11:49 PM	Tube furnace set to 0
7/16/2010	6:11:49 PM	Run finished at 6:11 PM
7/16/2010	6:11:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/16/2010	6:15:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/16/2010	6:15:09 PM	Recipe started at 6:15 PM
7/16/2010	6:15:10 PM	Helium valve closed
7/16/2010	6:15:10 PM	H2 valve closed
7/16/2010	6:15:10 PM	BCl3 valve closed
7/16/2010	6:15:10 PM	PH3 valve closed
7/16/2010	6:15:10 PM	SiCl4 pre valve closed
7/16/2010	6:15:10 PM	SiCl4 post valve closed
7/16/2010	6:15:10 PM	Main Vac valve closed
7/16/2010	6:15:10 PM	Bubbler valve closed
7/16/2010	6:15:10 PM	Bypass valve opened
7/16/2010	6:15:10 PM	Helium MFC set to  0.000000
7/16/2010	6:15:10 PM	H2 MFC set to  0.000000
7/16/2010	6:15:10 PM	BCl3 MFC set to  0.000000
7/16/2010	6:15:10 PM	PHl3 MFC set to  0.000000
7/16/2010	6:15:10 PM	SiCl4 MFC set to  0.000000
7/16/2010	6:15:10 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	6:15:10 PM	Tube furnace set to 0
7/16/2010	6:15:44 PM	Helium valve closed
7/16/2010	6:15:44 PM	H2 valve closed
7/16/2010	6:15:44 PM	BCl3 valve closed
7/16/2010	6:15:44 PM	PH3 valve closed
7/16/2010	6:15:44 PM	SiCl4 pre valve closed
7/16/2010	6:15:44 PM	SiCl4 post valve closed
7/16/2010	6:15:44 PM	Bubbler valve closed
7/16/2010	6:15:44 PM	Main Vac valve opened
7/16/2010	6:15:44 PM	Bypass valve opened
7/16/2010	6:15:44 PM	Helium MFC set to  0.000000
7/16/2010	6:15:44 PM	H2 MFC set to  0.000000
7/16/2010	6:15:44 PM	BCl3 MFC set to  0.000000
7/16/2010	6:15:44 PM	PHl3 MFC set to  0.000000
7/16/2010	6:15:44 PM	SiCl4 MFC set to  0.000000
7/16/2010	6:15:44 PM	Bypass solenoid MFC set to  0.000000
7/16/2010	6:15:44 PM	Tube furnace set to 0
7/16/2010	6:15:45 PM	Run finished at 6:15 PM
7/16/2010	6:15:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
